Die defect detection: Datasets & Models
Automated detection of physical defects on semiconductor dies using object detection models trained on wafer and die-level imagery. Flags cracks, scratches, contamination, and other anomalies before packaging.
Die defect detection
This workflow runs semiconductor die defect detection by applying an object detection model to images of individual dies captured on a wafer or after singulation. It locates and classifies surface and edge anomalies such as cracks, chips, scratches, and particle contamination, returning bounding boxes for each defect it finds.
Try it out
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Why automate die defect detection
Manual die inspection under a microscope is slow, fatiguing, and inconsistent across operators, which is a real problem at the throughput volumes and tight tolerances of semiconductor fabrication. Subtle defects like hairline cracks or micro-contamination are easy to miss by eye, and missed defects that reach packaging or assembly become far more expensive to catch downstream. Automating this with computer vision gives you repeatable, objective inspection that runs at line speed and catches anomalies consistently regardless of shift or operator. It also produces structured defect data you can analyze to trace yield loss back to specific process steps.
Key benefits
A trained detection model applies the same criteria to every die, improving consistency and freeing skilled operators for higher-value work while scaling to inspect thousands of dies per hour. It integrates with existing AOI cameras, inspection microscopes, and wafer probe stations rather than requiring new capital equipment. Because every detection is logged with location and defect class, teams get traceable data that supports yield analysis and continuous process improvement across the fab.
How to use it
- Upload an image: Drop any photo into the widget above to try die defect detection for free, right on this page.
- Preview instant results: The model detects crack, scratch, chip, contamination particle, die edge within seconds and returns an annotated image with structured predictions, so you can immediately see how well it works. Adjust the detection classes and re-run until the results fit your scenario.
- Like what you see?: With a free Roboflow account, you can deploy this workflow with the Serverless Cloud API, customize it in your workspace, or train RF-DETR on your own images for production accuracy.
- Get started for free: No code or training data required to begin: upload, review the results, and make it part of your stack in a single click.
Recommended model for die defect detection
RF-DETR is state of the art for real-time object detection, instance segmentation, and keypoint detection, with higher accuracy and lower latency than comparable models, and it's Apache 2.0 licensed. When you're ready to build a production model for die defect detection, fine-tune it on your own labeled images, then deploy to a Serverless Cloud API endpoint.
Not sure where to start?
Describe your Die Defect Detection project to Roboflow Agent.